Journal of Micro/Nano Lithography, MEMS, and MOEMS
نویسندگان
چکیده
منابع مشابه
Moems - Mems 2006 2006
Devices/Applications/Reliability 6111 Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V (Tanner/Ramesham) 6112 Microfluidics, BioMEMS, and Medical Microsystems IV (Papautsky/Wang/Vauchier) 6113 MEMS/MOEMS Components and Their Applications III (Olivier/Tadigadapa/Henning) 6114 MOEMS, Display, Imaging, and Miniaturized Microsystems IV (Ürey/Dickensheets/Gogoi) Founding Chair M...
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Introduction The full hermetic package for electronics and optoelectronic (OE) devices was first developed in the 1800’s and has served these industries well. The earliest optoelectronic devices, cathode ray tubes (CRT) demonstrated in the late 1800’s, used a sealed glass vacuum enclosure. The Braun Tube, for example, was a scanning CRT display system that used a glass envelope to seal out the ...
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The ever-increasing drive to fabricate Integrated Circuits (ICs) with smaller feature sizes is stretching the capabilities of today’s optical lithography methods. Current research is focused on alternative lithographic techniques to create new platforms that more easily scale to sub-50 nm feature size and beyond. This paper presents an overview of alternative lithography technologies being inve...
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Terutake Hayashi, Takayuki Shibata, Takahiro Kawashima, Eiji Makino4,Takashi Mineta4, Toru Masuzawa5 1Department of Mechanical Engineering, Osaka University, Suita, Osaka, Japan 2 Department of Production Systems Engineering, Toyohashi University of Technology, Toyohashi, Japan 3Department of Electrical and Electronic Engineering, Toyohashi University of Toyohashi, Japan Department of Intellige...
متن کاملPackaging solutions for MEMS/MOEMS using thin films as mechanical components
Optoelectronic subsystems for are becoming increasingly important to reduce the costs of assembly and packaging. The mechanical properties of vapour-deposited thin films can be used to advantage; for example three micrometer thick silicon nitride microclips to hold single mode optic fibres in place in silicon V-shaped grooves. This paper describes the proposed use of pairs of thin film microcan...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2006
ISSN: 1932-5150
DOI: 10.1117/1.2188524